TAMS Autosampler

Posted on 21-06-2019

The TAMS Autosampler (fully automated and integrated in TAMS user interface) which is capable of performing measurements on a 6 inch wafer at different positions when installed in a TAMS (L6310240) accessory. Multi-sampling by placing a holder for 19 x 1 inch samples or 5 x 2 inch.

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